Quantitative laser diagnostics on trimethylindium pyrolysis and photolysis for functional nanoparticle growth

Samuelsson, Per and Magnusson, Martin H and Deppert, Knut and Aldén, Marcus and Li, Zhongshan (2022) Quantitative laser diagnostics on trimethylindium pyrolysis and photolysis for functional nanoparticle growth. Measurement Science and Technology, 33 (5). 055201. ISSN 0957-0233

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Abstract

We report on an optical investigation of the pyrolysis and photolysis of trimethylindium (TMIn) as a typical metalorganic precursor for functional nanowire growth, aiming at an in-depth understanding of the governing chemistry and optimization of aerosol-based (aerotaxy) and epitaxial growth processes. A flow reactor with special consideration given to optical access was built to provide the chemical environment for in situ optical measurements on the pyrolysis and photolysis of TMIn. By probing a resonant transition of the indium atom, high-resolution laser absorption and laser-induced fluorescence spectroscopy were applied to obtain the atomic indium concentration at different chosen conditions in a spatially and temporally resolved manner. The results indicate that quantitative measurements of indium atoms under growth conditions are feasible. A 213 nm pulsed laser was employed to induce photolytic dissociation of TMIn vapor under chosen conditions. The photolytic dissociation of TMIn vapor with an ultraviolet laser turns out to be a promising method in generating substantial chemical effects, indicated by the generation of visible clouds of indium particles, and high concentrations of indium atoms far beyond the pyrolytically generated amount.

Item Type: Article
Subjects: Open Research Librarians > Computer Science
Depositing User: Unnamed user with email support@open.researchlibrarians.com
Date Deposited: 16 Jun 2023 10:08
Last Modified: 30 Oct 2023 05:17
URI: http://stm.e4journal.com/id/eprint/1257

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